System for deposition and hydriding of thin metallic films without air exposure
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولMetallic residues after hydriding zirconium
As a part of the production of nitride nuclear fuel for use in fast nuclear reactors, zirconium is hydrided followed by nitriding and mixing with uranium nitride. This work concludes a study of unwanted metallic particles present in a powder that is supposed to be a zirconium hydride. Sponge zirconium was hydrided at different temperatures and different time intervals, and the resulting hydride...
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The most commonly used method for the production of thin films is based on deposition of atoms or molecules onto a solid surface. One of the suitable method is to produce high quality metallic, semiconductor and organic thin film is Ionized cluster beam deposition (ICBD), which are used in electronic, robotic, optical, optoelectronic devices. Many important factors such as cluster size, cluster...
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O presente artigo descreve um novo método para a síntese de filmes finos de óxidos metálicos. Um filamento de metal, que pode ser aquecido por uma fonte de corrente alternada é instalado numa câmara de vácuo. Por meio de um fluxômetro de massa, oxigênio pode ser admitido no interior da câmara. Da reação entre o oxigênio e o metal do filamento aquecido, espécies de óxidos voláteis Me x O y , ond...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science and Technology
سال: 1975
ISSN: 0022-5355
DOI: 10.1116/1.568587